公开(公告)号：US11673169B2

公开(公告)日：2023-06-13

申请号：US17294013

申请日：2019-11-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey Nikipelov ,  Dmitry Kurilovich ,  Fabio Sbrizzai ,  Marcus Adrianus Van de Kerkhof ,  Ties Wouter Van der Woord ,  Willem Joan Van der Zande ,  Jeroen Van Duivenbode ,  David Ferdinand Vles

IPC: B08B6/00 ,  B08B7/02 ,  B08B7/04 ,  G03F1/62 ,  G03F1/82

CPC classification number: B08B6/00 ,  B08B7/02 ,  B08B7/04 ,  G03F1/62 ,  G03F1/82

Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.