公开(公告)号：US20230400783A1

公开(公告)日：2023-12-14

申请号：US18027343

申请日：2021-09-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Michael Marinus Anna STEUR ,  Bas JANSEN ,  Andre Bernardus JEUNINK ,  Johannes Adrianus Cornelis Maria PIJNENBURG

IPC: G03F7/00

CPC classification number: G03F7/70716

Abstract: An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.