公开(公告)号：US12050392B2

公开(公告)日：2024-07-30

申请号：US18072196

申请日：2022-11-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Gerrit Jacobus Hendrik Brussaard ,  Johannes Richard Karl Kohler

IPC: G02F1/365 ,  G02F1/35

CPC classification number: G02F1/365 ,  G02F1/3528

Abstract: A waveguide including: a first section, the first section configured to generate, by a non-linear optical process, a broadened wavelength spectrum of pulsed radiation provided to an input end of the waveguide; a second section, the second section including an output end of the waveguide, the second section configured to exhibit a larger absolute value of group velocity dispersion than the first section; wherein a length of the second section is configured to reduce a peak intensity of one or more peaks in the broadened wavelength spectrum by at least 20%.