公开(公告)号：US20160299442A1

公开(公告)日：2016-10-13

申请号：US15100920

申请日：2014-11-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Hans BUTLER ,  Marcus Joseph Elisabeth Godfried BREUKERS ,  Marcel François HEERTJES

IPC: G03F7/20

CPC classification number: G03F7/70775 ,  G03F7/70725

Abstract: A control device configured to determine a primary first drive signal, based on a first error signal representing a difference between desired and measured positions of a first body, for driving a positioner driving the first body; determine a primary second drive signal, based on a second error signal representing a difference between desired and measured positions of a second body, for driving a positioner driving the second body; determine, based on the second error signal, a secondary first drive signal for driving the first body positioner; determine, based on the first error signal, a secondary second drive signal for driving the second body positioner; combine the primary and secondary first drive signals and combine the primary and secondary second drive signals; and output the combined first and second drive signals to the respective positioning devices.

Abstract translation: 一种控制装置，被配置为基于表示第一身体的期望位置和测量位置之间的差异的第一误差信号来确定主要第一驱动信号，用于驱动驱动第一身体的定位器; 基于表示第二机体的期望位置和测量位置之间的差异的第二误差信号来确定主要第二驱动信号，用于驱动驱动第二机体的定位器; 基于所述第二误差信号确定用于驱动所述第一主体定位器的辅助第一驱动信号; 基于所述第一误差信号确定用于驱动所述第二机身定位器的次级第二驱动信号; 组合主和次级第一驱动信号并组合主和次级第二驱动信号; 并将组合的第一和第二驱动信号输出到相应的定位装置。