公开(公告)号：US10146133B2

公开(公告)日：2018-12-04

申请号：US15743273

申请日：2016-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Wilhelmus Patrick Elisabeth Maria Op 'T Root ,  Herman Philip Godfried ,  Hubertus Petrus Leonardus Henrica Van Bussel ,  Arij Jonathan Rijke ,  Marc Wilhelmus Maria Van Der Wijst ,  Mathijs Leonardus Johan Verhees

IPC: G03F7/20

Abstract: A technique involving projecting a pulsed radiation beam using an illumination system onto a region of a plane in a reference frame; using a scanning mechanism to move a calibration sensor relative to the reference frame such that the calibration sensor moves through the beam of radiation in the plane along a scan trajectory; determining a quantity indicative of a velocity of the illumination system relative to the reference frame; and determining information related to a spatial intensity distribution of the radiation beam in the plane in dependence on: (a) an output of the calibration sensor; (b) the scan trajectory of the calibration sensor; and (c) the quantity indicative of a velocity of the illumination system relative to the reference frame.