公开(公告)号：US11860554B2

公开(公告)日：2024-01-02

申请号：US17606785

申请日：2020-03-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Mark Johannes Hermanus Frencken ,  Theodorus Marcus Nagtegaal ,  Oleg Viacheslavovich Voznyi

IPC: G03F7/00

CPC classification number: G03F7/70783 ,  G03F7/7075 ,  G03F7/70875

Abstract: The invention provides an object positioner comprising:—an object support having an object support surface which is configured to engage at least a part of an object, said object support surface having a support surface temperature,—a thermal device, which thermal device is configured to provide at least a part of the object with a first object temperature, which first object temperature differs from the support surface temperature by a first predetermined temperature difference.