公开(公告)号：US11880144B2

公开(公告)日：2024-01-23

申请号：US17603812

申请日：2020-03-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Sander Jeroen Hermanussen ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Hans Butler ,  Bas Jansen ,  Michael Marinus Anna Steur

IPC: G03F7/00 ,  H01L21/687

CPC classification number: G03F7/70725 ,  G03F7/70708 ,  G03F7/70783 ,  H01L21/6875 ,  H01L21/68735 ,  H01L21/68785

Abstract: An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.