公开(公告)号：US20240192608A1

公开(公告)日：2024-06-13

申请号：US18571913

申请日：2022-05-23

Applicant: ASML NETHERLANDS B.V.

Inventor： Shikhar BHARDWAJ

IPC: G03F7/00

CPC classification number: G03F7/70341 ,  G03F7/7085 ,  G03F7/70875 ,  G03F7/70916

Abstract: A tool for assessing a hole property of one or more holes in a component of a lithographic apparatus, the tool including: an assessment substrate; a fluid supply configured to supply a jet of fluid from each of the one or more holes to a first surface of the assessment substrate, wherein the fluid is supplied at a fluid temperature such that the one or more jets of fluid cause local temperature variations in at least part of the assessment substrate; and an infrared sensor configured to sense a temperature distribution of the assessment substrate in dependence on the local temperature variations.