公开(公告)号：US20180164701A1

公开(公告)日：2018-06-14

申请号：US15735956

申请日：2016-05-19

Applicant: ASML NETHERLANDS B.V.

Inventor： Jeroen Johannes Theodorus Hendrikus DE BEST ,  Wilhelmus Henricus Theodorus Maria AAMGEMEMT ,  Stan Henricus VAN DER MEULEN

IPC: G03F7/20 ,  G05B11/14

CPC classification number: G03F7/70725 ,  G05B11/14

Abstract: A control system configured to control a parameter of a dynamic system, wherein the parameter depends on an output signal. The control system comprises a set-point generator and a feedforward, wherein the set-point generator is arranged to provide a set-point signal to the feedforward. The feedforward is arranged to provide the output signal based on the set-point signal, wherein the feedforward is arranged to perform a non-linear operation on the set-point signal. The non-linear operation is based on a non-linear functional relationship between the output signal and the parameter.