公开(公告)号：US20200096881A1

公开(公告)日：2020-03-26

申请号：US16698905

申请日：2019-11-27

Applicant: ASML Netherlands B,V

Inventor： Jeroen VAN DUIVENBODE ,  Petrus Jacobus Maria VAN GILS ,  Petrus Johannes VAN DEN OEVER ,  Coen Hubertus Matheus BALTIS

IPC: G03F7/20 ,  B08B6/00

Abstract: An apparatus for removing particles from a clamp, the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion, a supporting portion, at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting portion is configured such that when a voltage is applied to the supporting portion of the apparatus and/or to an electrode of the clamp, the supporting portion acts as an electrode to allow an electric field to be generated between the apparatus and the clamp for removal of the particles from the clamp.