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公开(公告)号：US12139436B2
公开(公告)日：2024-11-12
申请号：US17767179
申请日：2020-10-09
Applicant: ASML Netherlands B.V.
Inventor： Dietmar Uwe Herbert Trees , Edwin Johan Buis , Theodorus Wilhelmus Driessen , Benjamin Andrew Sams , Brandon Michael Johnson
Abstract: A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.
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2.发明授权公开(公告)号：US12295088B2
公开(公告)日：2025-05-06
申请号：US17922056
申请日：2021-04-26
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Herman Harry Borggreve , Brandon Michael Johnson , Vikas Giridhar Telkar
Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.
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3.发明公开公开(公告)号：US20230171869A1
公开(公告)日：2023-06-01
申请号：US17922056
申请日：2021-04-26
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Herman Harry Borggreve , Brandon Michael Johnson , Vikas Giridhar Telkar
CPC classification number: H05G2/006 , B05B1/02 , G03F7/70033 , H05G2/008
Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.
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公开(公告)号：US20220363596A1
公开(公告)日：2022-11-17
申请号：US17767179
申请日：2020-10-09
Applicant: ASML Netherlands B.V.
Inventor： Dietmar Uwe Herbert Trees , Edwin Johan Buis , Theodorus Wilhelmus Driessen , Benjamin Andrew Sams , Brandon Michael Johnson
Abstract: A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.
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