公开(公告)号：US11592756B2

公开(公告)日：2023-02-28

申请号：US15734882

申请日：2019-05-09

Applicant: ASML Netherlands B.V.

Inventor： Hessel Bart Koolmees ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/20 ,  H02K3/02 ,  H02K41/02 ,  H02K55/00

Abstract: The invention provides an assembly comprising a cryostat (6, 7, 8, 9) and a flat coil layer (3) of superconducting coils (2) for use with a magnetic levitation and/or acceleration motor system (1) of a lithographic apparatus. The cryostat comprises two insulation coverings (8, 9). The coil layer is arranged between the two coverings. The coverings each comprise an inner plate (10) configured to be cryocooled and an outer plate (11) parallel to the inner plate, and an insulation system with a vacuum layer (13) between the inner and outer plate. The insulation system of said covering comprises a layer of circular bodies (101), the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

公开(公告)号：US11860553B2

公开(公告)日：2024-01-02

申请号：US18100400

申请日：2023-01-23

Applicant: ASML Netherlands B.V.

Inventor： Hessel Bart Koolmees ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/00 ,  H02K3/02 ,  H02K41/02 ,  H02K55/00 ,  G03F7/20

CPC classification number: G03F7/70775 ,  H02K3/02 ,  H02K41/02 ,  H02K55/00

Abstract: The invention provides an assembly having a cryostat and a flat coil layer of superconducting coils for use with a magnetic levitation and/or acceleration motor system of a lithographic apparatus. The cryostat has two insulation coverings. The coil layer is arranged between the two coverings. The coverings each have an inner plate configured to be cryocooled and an outer plate parallel to the inner plate, and an insulation system with a vacuum layer between the inner and outer plate. The insulation system of said covering has a layers of circular bodies, the central axes of these bodies extending perpendicular to the inner and outer plate, and is configured to provide a layer of point contacts between two layers of circular bodies or between a layer of circular bodies and the inner and/or outer plate.

公开(公告)号：US11022901B2

公开(公告)日：2021-06-01

申请号：US16647080

申请日：2018-09-24

Applicant: ASML NETHERLANDS B.V.

Inventor： Hessel Bart Koolmees ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G03F7/20

Abstract: A positioning device configured to position an object, the positioning device including: an object table configured to hold the object; an electromagnetic motor configured to displace the object table, the electromagnetic motor including: a coil assembly mounted to the object table, a superconductor assembly configured to co-operate with the coil assembly to generate a driving force on the object table, and a cryogenic enclosure configured to enclose the superconductor assembly and maintain the superconductor assembly in a superconductive state; a support for supporting the electromagnetic motor; and an electromagnetic support configured to suspend the cryogenic enclosure relative to the support, thereby maintaining a gap between the cryogenic enclosure and the support.