公开(公告)号：US20240164004A1

公开(公告)日：2024-05-16

申请号：US18280917

申请日：2022-02-10

Applicant: ASML Netherlands B.V.

Inventor： Dietmar Uwe Herbert Trees ,  Theodorus Wilhelmus Driessen ,  Benjamin Andrew Sams ,  Edgardo Zamora Atencio ,  Ondrej Dvorak

IPC: H05G2/00 ,  G03F7/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/008

Abstract: A component for a target material transfer system for a laser-produced plasma radiation source and a method of manufacturing such a component are disclosed. The component, which may, for example, be a target material transfer line, a freeze valve, or a flow restrictor, or some combination of this functionality, is made up of a glass capillary body sealed with glass-to-metal seals at both of its ends to a respective metal fitting. The method of manufacturing involves heating the ends of the glass capillary and then forming them to conform with, and forming a glass-to-metal seal with, the interior contours of the respective channels in each of the metal fittings.