公开(公告)号：US10007197B2

公开(公告)日：2018-06-26

申请号：US15121719

申请日：2015-03-02

Applicant: ASML Netherlands B.V.

Inventor： Joeri Lof ,  Joost Kauffman ,  Martin Dieter Nico Peters ,  Petrus Theodorus Rutgers ,  Martijn Hendrikus Wilhelmus Stopel ,  Gerard Van Den Eijkel ,  Harmen Klaas Van Der Schoot ,  Raimond Visser

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68 ,  H01L21/687 ,  G01B11/27 ,  H01L21/66

CPC classification number: G03F7/70775 ,  G01B11/272 ,  G03F7/7075 ,  G03F9/7011 ,  H01L21/681 ,  H01L21/682 ,  H01L21/68707 ,  H01L22/12

Abstract: A sensor system configured to determine a position of a substrate having an edge. The sensor system includes a radiation source arranged to emit a radiation bundle, a reflective element, a detector device and a substrate table having a supporting surface for supporting the substrate. The supporting surface is at least partly along a plane. The radiation source and the detector device are arranged on a first side of the plane. The reflective element is arranged on a second side of the plane other than the first side. The reflective element is arranged to create a reflected bundle by reflecting the radiation bundle. The reflective element is arranged to illuminate the edge with the reflected bundle. The detector device is arranged to receive the reflected bundle.