公开(公告)号：US20230384276A1

公开(公告)日：2023-11-30

申请号：US18032438

申请日：2021-09-27

Applicant: ASML Netherlands B.V.

Inventor： Reinier Theodorus Martinus JILISEN ,  Maarten Jan HEERKENS ,  Hendrikus Petrus KLUIJTMANS ,  Robbert Willem Frederik OOSTERBAAN ,  Antonius Marinus Coenraad Petrus Leonardus VAN DE KERKHOF

IPC: G01N33/00 ,  G01N27/64

CPC classification number: G01N33/0006 ,  G01N27/64

Abstract: Disclosed herein is a residual gas analyser for detecting gas in a vacuum tool, the residual gas analyser comprising: one or more ion sources configured to ionise a gas in the residual gas analyser; one or more detectors configured to detect an ionised gas by the ion source; and one or more gas generating filaments configured to generate gas within the residual gas analyser.