公开(公告)号：US11694312B2

公开(公告)日：2023-07-04

申请号：US17308835

申请日：2021-05-05

Applicant: ASML Netherlands B.V.

Inventor： Wei Fang ,  Ruochong Fei ,  Lingling Pu ,  Wentian Zhou ,  Liangjiang Yu ,  Bo Wang

IPC: G06T5/00 ,  G06T7/10 ,  G06T5/50

CPC classification number: G06T5/003 ,  G06T5/50 ,  G06T7/10 ,  G06T2207/10061 ,  G06T2207/20201 ,  G06T2207/30148

Abstract: An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a first image and a second image of multiple stacked layers of a sample that are taken with a first focal point and a second focal point, respectively, associating a first segment of the first image with a first layer among the multiple stacked layers and associating a second segment of the second image with a second layer among the multiple stacked layers, updating the first segment based on a first reference image corresponding to the first layer and updating the second segment based on a second reference image corresponding to the second layer, and combining the updated first segment and the updated second segment to generate a combined image including the first layer and the second layer.