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Patent Agency Ranking
1.发明公开公开(公告)号：US20230171869A1
公开(公告)日：2023-06-01
申请号：US17922056
申请日：2021-04-26
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Herman Harry Borggreve , Brandon Michael Johnson , Vikas Giridhar Telkar
CPC classification number: H05G2/006 , B05B1/02 , G03F7/70033 , H05G2/008
Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.
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公开(公告)号：US20240292510A1
公开(公告)日：2024-08-29
申请号：US18571490
申请日：2022-06-02
Applicant: ASML Netherlands B.V.
Inventor： Alexander Igorevich Ershov , Theodorus Wilhelmus Driessen , Dietmar Uwe Herbert Trees , Vikas Giridhar Telkar
IPC: H05G2/00
Abstract: Apparatus for and method of accelerating droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting a nozzle (200) in a stream that breaks up into droplets that then undergo coalescence. A gas provided for the purpose of accelerating the droplets is caused to flow past the nozzle in a streamwise direction.
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公开(公告)号：US12222050B2
公开(公告)日：2025-02-11
申请号：US18010312
申请日：2021-07-13
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Vikas Giridhar Telkar , Alexander Igorevich Ershov , Theodorus Wilhelmus Driessen , Serkan Kincal
Abstract: A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket (1105) having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor (1160) can be seated in the gasket.
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4.发明授权公开(公告)号：US12295088B2
公开(公告)日：2025-05-06
申请号：US17922056
申请日：2021-04-26
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Theodorus Wilhelmus Driessen , Herman Harry Borggreve , Brandon Michael Johnson , Vikas Giridhar Telkar
Abstract: A droplet generator nozzle (800, 820/830) includes a metal body (802, 822), a metal fitting (812, 823/833) arranged adjacent to the metal body, and a capillary (804, 824/834) comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element (808 828/838) disposed within the metal body and coupled to the first end of the capillary and a fastener element (810) configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzle 830 of FIG. 8C represents the embodiment shown in FIG. 8B, in a cross section orthogonal to the cross section shown in FIG. 8B.
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公开(公告)号：US20230279974A1
公开(公告)日：2023-09-07
申请号：US18010312
申请日：2021-07-13
Applicant: ASML Netherlands B.V.
Inventor： Benjamin Andrew Sams , Dietmar Uwe Herbert Trees , Vikas Giridhar Telkar , Alexander Igorevich Ershov , Theodorus Wilhelmus Driessen , Serkan Kincal
IPC: F16L17/02
Abstract: A target material supply apparatus includes: first and second fluid flow components (1122, 1126) that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket (1105) having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor (1160) can be seated in the gasket.
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