公开(公告)号：US20240331132A1

公开(公告)日：2024-10-03

申请号：US18577684

申请日：2022-06-03

Applicant: ASML Netherlands B.V.

Inventor： Haoyi LIANG ,  Yani CHEN ,  Ming-Yang YANG ,  Yang YANG ,  Xiaoxia HUANG ,  Zhichao CHEN ,  Liangjiang YU ,  Zhe WANG ,  Lingling PU

IPC: G06T7/00 ,  G01N23/2251 ,  G06T7/73

CPC classification number: G06T7/001 ,  G01N23/2251 ,  G06T7/0006 ,  G06T7/74 ,  G01N2223/6116 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: Systems and methods for detecting a defect on a sample include receiving a first image and a second image associated with the first image; determining, using a clustering technique, N first feature descriptor(s) for L first pixel(s) in the first image and M second feature descriptor(s) for L second pixel(s) in the second image, wherein each of the L first pixel(s) is co-located with one of the L second pixel(s), and L, M, and N are positive integers; determining K mapping probability between a first feature descriptor of the N first feature descriptor(s) and each of K second feature descriptor(s) of the M second feature descriptor(s), wherein K is a positive integer; and providing an output for determining whether there is existence of an abnormal pixel representing a candidate defect on the sample based on a determination that one of the K mapping probability does not exceed a threshold value.