GYROSCOPE, METHODS OF FORMING AND OPERATING THE SAME

    公开(公告)号:US20200173780A1

    公开(公告)日:2020-06-04

    申请号:US16638082

    申请日:2018-08-16

    Abstract: Various embodiments may provide a gyroscope. The gyroscope may include a piezoelectric substrate, an excitation transducer configured to generate a surface acoustic wave, and a sensing transducer configured to receive the surface acoustic wave generated by the excitation transducer. The gyroscope may additionally include a mass dot array between the excitation transducer and the sensing transducer, the mass dot array configured to generate a stress on the piezoelectric substrate based on a rotation of said gyroscope upon the surface acoustic wave passing through the mass dot array. The gyroscope may also include a light source, and an optical detector configured to receive one or more light beams generated by the light source to determine the rotation of the gyroscope based on a property of the one or more light beams. The property of the one or more light beams may be variable based on the stress on the piezoelectric substrate.

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