公开(公告)号：US10962765B1

公开(公告)日：2021-03-30

申请号：US16367031

申请日：2019-03-27

Applicant: Agiltron, Inc.

Inventor： Jing Zhao ,  Xiangchen Che

IPC: G02B26/08 ,  B81B7/00 ,  B81B7/02

Abstract: A planer silicon-based displacement amplification structure and a method are provided for latching the displacement. The displacement amplification structure may include a first actuation beam and a second actuation beam coupled to the first beam with an angle, the ends of the first beam and the second beam coupled to fixture sites, and an end of the second beam coupled to a motion actuator; a motion shutter coupled to an opposing end of the first and second beams; and a latching thermoelectric displacement structure blocking the shutter return path and have faster response than the shutter structure.