Semiconductor holding fixture and method
    1.
    发明授权
    Semiconductor holding fixture and method 失效
    半导体夹具及方法

    公开(公告)号:US4847119A

    公开(公告)日:1989-07-11

    申请号:US79583

    申请日:1987-07-30

    IPC分类号: B05C13/02 G03F7/16 H01L21/687

    摘要: There is disclosed a method and apparatus for easily mounting, holding and facilitating the coating of preselected areas of very thin semiconductor samples. The apparatus includes a base adapted for placement in a coating chamber. The base includes a pair of spaced apart supporting arms onto which a plurality of stacked samples can be loaded. A cover is then slidably positioned over the stacked samples to hold the stacked samples in position during coating. The cover in conjunction with the supporting arms define an open sided cavity to enable the samples to be coated. The apparatus also can be used to hold only one sample.

    摘要翻译: 公开了一种用于容易地安装,保持和促进非常薄的半导体样品的预选区域的涂覆的方法和装置。 该装置包括适于放置在涂布室中的底座。 底座包括一对间隔开的支撑臂,多个堆叠的样品可以在其上装载。 然后将覆盖物可滑动地定位在堆叠的样品之上,以在涂覆期间将堆叠的样品保持在适当的位置。 与支撑臂结合的盖限定了敞开的侧面空腔,以使样品能够被涂覆。 该装置也可用于仅容纳一个样品。

    Spreader roller system having adjustable roller gap
    3.
    发明授权
    Spreader roller system having adjustable roller gap 失效
    具有可调辊间隙的撒布机滚筒系统

    公开(公告)号:US4360260A

    公开(公告)日:1982-11-23

    申请号:US308423

    申请日:1981-10-05

    IPC分类号: G03B17/52 G03D9/02

    CPC分类号: G03B17/52

    摘要: There is disclosed an assembly usable in a photographic apparatus for adjustably presetting the gap spacing of a pair of juxtaposed rollers used for spreading film processing fluid between a pair of sheets traveling therebetween. The presetting assembly includes a movable gap setting member having a plurality of surface portions formed thereon, each of which facilitates formation of a different gap which, in turn, facilitates a different processing fluid layer thickness. The member is movable in a manner which allows different ones of the surface portions to operatively cooperate with the rollers so as to establish correspondingly different gap spacings.

    摘要翻译: 公开了一种可用于照相设备中的组件,用于可调节地预定用于在其间传播的一对片材之间用于铺展膜处理流体的一对并置辊的间隙。 预置组件包括可移动间隙设定构件,其具有形成在其上的多个表面部分,每个表面部分有助于形成不同的间隙,这进而有助于不同的加工流体层厚度。 构件可以以允许不同的表面部分与辊可操作地协作以便建立相应不同的间隙间隔的方式移动。