公开(公告)号：US20250167036A1

公开(公告)日：2025-05-22

申请号：US18516849

申请日：2023-11-21

Applicant: Applied Materials, Inc.

Inventor： Sanjay BHAT

IPC: H01L21/683 ,  H01L21/68 ,  H01L21/687

Abstract: Embodiments of chuck plates for a substrate support are provided herein. In some embodiments, the chuck plate includes an upper surface defining a support surface for a substrate and having a coating comprising a material with less reflectivity than a base material of the chuck plate, wherein the upper surface includes a plurality of vacuum grooves, wherein the plurality of vacuum grooves are arranged in a plurality of zones that are fluidly independent from each other along the upper surface and fluidly coupled to a common vacuum port disposed at a lower surface of the chuck plate.