公开(公告)号：US11145726B2

公开(公告)日：2021-10-12

申请号：US16654904

申请日：2019-10-16

Applicant: Applied Materials, Inc.

Inventor： Sushant Mittal ,  Ashish Pal ,  El Mehdi Bazizi ,  Angada Sachid

IPC: H01L29/417 ,  H01L29/66 ,  H01L29/78

Abstract: Semiconductor structures may include a substrate. The structures may include a gate structure overlying the substrate and formed in a first direction across the substrate. The structures may include a fin overlying the substrate and formed in a second direction across the substrate. The second direction may be orthogonal to the first direction, and the fin may intersect the gate structure. The structures may include a source/drain material formed about the fin. The structures may include a through-contact material extending vertically above the source/drain material. The structures may include a metal material extending vertically above the through-contact material. An interface between the metal material and the through-contact material may be characterized by a non-planar profile.

公开(公告)号：US20210119002A1

公开(公告)日：2021-04-22

申请号：US16654904

申请日：2019-10-16

Applicant: Applied Materials, Inc.

Inventor： Sushant Mittal ,  Ashish Pal ,  El Mehdi Bazizi ,  Angada Sachid

IPC: H01L29/417 ,  H01L29/78 ,  H01L29/66

Abstract: Semiconductor structures may include a substrate. The structures may include a gate structure overlying the substrate and formed in a first direction across the substrate. The structures may include a fin overlying the substrate and formed in a second direction across the substrate. The second direction may be orthogonal to the first direction, and the fin may intersect the gate structure. The structures may include a source/drain material formed about the fin. The structures may include a through-contact material extending vertically above the source/drain material. The structures may include a metal material extending vertically above the through-contact material. An interface between the metal material and the through-contact material may be characterized by a non-planar profile.