公开(公告)号：US20170205359A1

公开(公告)日：2017-07-20

申请号：US15001099

申请日：2016-01-19

Applicant: Applied Materials Israel, Ltd.

Inventor： Harel Ilan ,  Ido Kofler ,  Ido Dolev

IPC: G01N21/95

CPC classification number: G01N21/9505 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/956

Abstract: An inspection system that may include a first detection module, an illumination and collection module, and a processor. The illumination and collection module and the first detection module may be configured to execute one or more illumination and collection iterations. Each inspection iteration may include: illuminating with illuminating radiation multiple points of an object; (ii) directing first collected radiation from the multiple points of the object through one or more first exit pupil regions towards the first detection module; and (iii) generating first detection signals that may be indicative of the first collected radiation. The processor may be configured to process the first detection signals to provide a first mapping between (i) a characteristic of radiation at the first exit pupil, (ii) the multiple points of the object, and (iii) the multiple first exit pupil regions.

公开(公告)号：US09664907B2

公开(公告)日：2017-05-30

申请号：US14336862

申请日：2014-07-21

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yoav Berlatzky ,  Seffi Sadeh ,  Ido Kofler ,  Haim Eder ,  Michael Rudman ,  Hagay Famini

IPC: G02B27/09 ,  H01L27/146 ,  G02B21/06 ,  G02B5/20 ,  G02B27/14

CPC classification number: G02B27/0905 ,  G02B5/201 ,  G02B21/06 ,  G02B27/143

Abstract: A spatial beam shaper structure and a corresponding optical system are provided. The spatial beam shaper structure comprises a light collecting surface configured for affecting light impinging thereon to provide a substantially smooth light profile of at least one optical property, the light collecting surface having a pattern in the form of multiple surface regions comprising regions of at least two different optical properties arranged in an alternating fashion, wherein an interface region between each two locally adjacent regions of the different optical properties has the at least two different optical properties, to provide substantially smooth transition of said different optical properties within the interface region.

公开(公告)号：US09846128B2

公开(公告)日：2017-12-19

申请号：US15001099

申请日：2016-01-19

Applicant: Applied Materials Israel, Ltd.

Inventor： Harel Ilan ,  Ido Kofler ,  Ido Dolev

IPC: G01N21/95

CPC classification number: G01N21/9505 ,  G01N21/93 ,  G01N21/9501 ,  G01N21/956

Abstract: An inspection system that may include a first detection module, an illumination and collection module, and a processor. The illumination and collection module and the first detection module may be configured to execute one or more illumination and collection iterations. Each inspection iteration may include: illuminating with illuminating radiation multiple points of an object; (ii) directing first collected radiation from the multiple points of the object through one or more first exit pupil regions towards the first detection module; and (iii) generating first detection signals that may be indicative of the first collected radiation. The processor may be configured to process the first detection signals to provide a first mapping between (i) a characteristic of radiation at the first exit pupil, (ii) the multiple points of the object, and (iii) the multiple first exit pupil regions.

公开(公告)号：US20160018660A1

公开(公告)日：2016-01-21

申请号：US14336862

申请日：2014-07-21

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yoav Berlatzky ,  Seffi Sadeh ,  Ido Kofler ,  Haim Eder ,  Michael Rudman ,  Hagay Famini

IPC: G02B27/09 ,  H01L27/146

CPC classification number: G02B27/0905 ,  G02B5/201 ,  G02B21/06 ,  G02B27/143

Abstract: A spatial beam shaper structure and a corresponding optical system are provided. The spatial beam shaper structure comprises a light collecting surface configured for affecting light impinging thereon to provide a substantially smooth light profile of at least one optical property, the light collecting surface having a pattern in the form of multiple surface regions comprising regions of at least two different optical properties arranged in an alternating fashion, wherein an interface region between each two locally adjacent regions of the different optical properties has the at least two different optical properties, to provide substantially smooth transition of said different optical properties within the interface region.

Abstract translation: 提供空间光束整形器结构和相应的光学系统。 空间光束整形器结构包括光收集表面，其被配置用于影响入射到其上的光以提供至少一个光学特性的基本平滑的光分布，所述光收集表面具有多个表面区域形式的图案，所述多个表面区域包括至少两个 以交替方式布置的不同光学性质，其中不同光学性质的每个两个局部相邻区域之间的界面区域具有至少两个不同的光学性质，以提供所述不同光学性质在界面区域内的基本上平滑的转变。