Optical Phased Array Using Stacked Parallel Plate Wave Guides And Method Of Fabricating Arrays Of Stacked Parallel Plate Waveguides
    1.
    发明申请
    Optical Phased Array Using Stacked Parallel Plate Wave Guides And Method Of Fabricating Arrays Of Stacked Parallel Plate Waveguides 有权
    使用堆叠平行板波导的光相控阵和叠层平行板波导阵列的制作方法

    公开(公告)号:US20160274437A1

    公开(公告)日:2016-09-22

    申请号:US15035333

    申请日:2015-09-01

    Abstract: A method for fabricating crystalline dielectric material on top of metal layers to produce an apparatus for non-mechanical steering of an input laser beam is provided. The apparatus may include a plurality of stacked parallel dielectric waveguides, each waveguide of which is fabricated by separating layers of dielectric material from a donor wafer and bonding the separated layers of dielectric material to a receiving wafer. A plurality of voltages is applied across the stacked parallel dielectric waveguides. Each of the stacked parallel dielectric waveguides is electrically phase modulated to deflect an output beam in a predictable manner.

    Abstract translation: 提供了一种用于在金属层顶部制造结晶介电材料以产生用于输入激光束的非机械转向的装置的方法。 该装置可以包括多个堆叠的平行介质波导,每个波导通过从施主晶片分离介电材料层并将分离的电介质材料层接合到接收晶片来制造。 跨越堆叠的平行介质波导施加多个电压。 层叠的平行介质波导中的每一个被电相位调制以以可预测的方式偏转输出光束。

Patent Agency Ranking