公开(公告)号：US20250067934A1

公开(公告)日：2025-02-27

申请号：US18938928

申请日：2024-11-06

Applicant: CISCO TECHNOLOGY, INC.

Inventor： Li Chen ,  Long Chen ,  Christopher Doerr

IPC: G02B6/136 ,  G02B6/12 ,  G02B6/132

Abstract: In part, in one aspect, the disclosure relates to a method for passivating a waveguide of an optical circuit. The method includes etching a suspended waveguide in the optical circuit; the suspended waveguide having a top surface, a bottom surface, and side surfaces; and covering the top surface and side surfaces of the suspended waveguide with a passivation coating having a thickness that ranges from between about 10 nm to about 20 nm. In one embodiment, the method further includes removing one or more coatings from a portion of the optical circuit. The disclosure also relates to various passivated optical silicon circuit embodiments.