公开(公告)号：US20220128760A1

公开(公告)日：2022-04-28

申请号：US17423062

申请日：2020-01-17

Applicant: COMMSCOPE TECHNOLOGIES LLC

Inventor： Ana RADOSAVLJEVIC ,  Andres DESMET ,  Jeroen MISSINNE ,  Geert Firmin VAN STEENBERGE ,  Dries VAN THOURHOUT ,  Salvatore TUCCIO ,  Vivek PANAPAKKAM VENKATESAN ,  Saurav KUMAR ,  Cristina LERMA ARCE ,  Jan WATTÉ

IPC: G02B6/12 ,  G02B6/35 ,  G02B6/136

Abstract: The invention relates to the fabrication of optical switches in transparent substrates. The method includes exposing part of the substrate to a stream of femtosecond laser pulses to form an exposed volume which can later be etched to form a channel used for microfluidic control of the switch. This process is referred to as femtosecond laser induced chemical etching (FLICE). The waveguides of the optical switch are also written in the substrate by using femtosecond laser inscription (FLI), which can be performed in the same operation as the exposure step in the FLICE formation of the channel, thus ensuring alignment between the waveguides and the channel.