公开(公告)号：US06693268B2

公开(公告)日：2004-02-17

申请号：US09960664

申请日：2001-09-24

Applicant: Cheng-Bin Wang

Inventor： Cheng-Bin Wang

IPC: H01L2715

CPC classification number: H01S5/0264 ,  G01J1/32 ,  G01J1/42 ,  H01S5/0683 ,  H01S5/183

Abstract: An auto feedback and photo attenuation structure of a vertical cavity surface emitting laser (VCSEL) includes a VCSEL combined with a monitor photodetector (MPD). The thickness of the absorbing layer of the MPD may be adjusted, so that when output light of different wavelengths passes through the MPD, a portion of light may be absorbed by the absorbing layer to function as a feedback path of an auto power control, and a portion of light may penetrate through the absorbing layer, and may satisfy the requirement of the eye safety class I. The thickness of the absorbing layer of the MPD may be controlled precisely, thereby increasing the quality of products and decreasing cost of fabrication.

Abstract translation: 垂直腔表面发射激光器（VCSEL）的自动反馈和光衰减结构包括与监视器光电检测器（MPD）组合的VCSEL。 可以调节MPD的吸收层的厚度，使得当不同波长的输出光通过MPD时，一部分光可以被吸收层吸收，用作自动功率控制的反馈路径，并且 一部分光可以穿透吸收层，并且可以满足眼睛安全等级I的要求。可以精确地控制MPD的吸收层的厚度，从而提高产品的质量并降低制造成本。