公开(公告)号：US20190317471A1

公开(公告)日：2019-10-17

申请号：US16376347

申请日：2019-04-05

Applicant: DISCO CORPORATION

Inventor： Keiji KASHIWAGI ,  Satoshi MIYATA

IPC: G05B19/402

Abstract: A cutting apparatus includes a chuck table that holds a workpiece, a processing unit that forms a processed groove in the workpiece, an imaging unit that images the workpiece, a display unit that displays a captured image of a processed groove imaged by the imaging unit, and a control unit that executes display control of a display screen of the display unit. The control unit causes a mark that indicates the latest processed groove based on the Y-coordinate of the latest processed groove to be displayed on the display unit while being superimposed on a captured image.

公开(公告)号：US20210235007A1

公开(公告)日：2021-07-29

申请号：US17143373

申请日：2021-01-07

Applicant: DISCO CORPORATION

Inventor： Takafumi OMORI ,  Satoshi MIYATA

IPC: H04N5/235 ,  H04N5/232

Abstract: A method of adjusting the brightness of an illuminator in a processing apparatus includes, by a first processing apparatus, storing a sample image obtained by photographing a workpiece with a brightness specified by a first control value, together with the first control value, copying the sample image, the first control value and a processing condition to a second processing apparatus, by the second processing apparatus, storing a plurality of comparative images obtained by photographing the workpiece with brightnesses specified by a plurality of different control values, identifying a control value at a time of photographing a comparative image having a minimum difference in brightness from the sample image as a second control value, by comparing the sample image with the plurality of comparative images, and setting a difference between the first and second control values as a correction value of the control value of the second processing apparatus.

公开(公告)号：US20190287836A1

公开(公告)日：2019-09-19

申请号：US16298092

申请日：2019-03-11

Applicant: DISCO CORPORATION

Inventor： Satoshi MIYATA

IPC: H01L21/68 ,  H01L21/78 ,  G06T7/00 ,  G06T7/11 ,  G01B11/00

Abstract: A positioning method includes an imaging step, a straight line storage step, a straight line registration step, and a positioning step. The imaging step captures an image of a region including a target or street on a workpiece. The straight line storage step detects and stores the coordinate positions of all predetermined straight lines in the region. The straight line registration step allows an operator to select a specific straight line in the target or on the street from all the straight lines and register the selected straight line. The positioning step positions a processing unit on the street in accordance with coordinate data concerning the straight line selected and registered in the straight line registration step.

公开(公告)号：US20210066129A1

公开(公告)日：2021-03-04

申请号：US17004463

申请日：2020-08-27

Applicant: DISCO CORPORATION

Inventor： Satoshi MIYATA

IPC: H01L21/78 ,  H01L21/683 ,  H01L21/68

Abstract: A recognition method of a kerf includes a bonding step of bonding a workpiece to a dicing tape greater in size than the workpiece, a pre-machining imaging step of imaging an optimal region of the dicing tape where the workpiece is not bonded, a kerf forming step of forming a kerf in the optimal region by a cutting machine, a post-machining imaging step of imaging the optimal region with the kerf formed therein, and a recognition step of comparing intensities of light received at each two corresponding pixels in respective images of the optimal region as acquired by the pre-machining imaging step and the post-machining imaging step, subtracting the each two pixels where intensities of received light are the same, and recognizing as the kerf a region formed by the remaining pixels.

公开(公告)号：US20190271962A1

公开(公告)日：2019-09-05

申请号：US16287560

申请日：2019-02-27

Applicant: DISCO CORPORATION

Inventor： Satoshi MIYATA

IPC: G05B19/402 ,  G06F3/0488 ,  G06F3/0484 ,  G06T7/00

Abstract: A control method for a processing apparatus includes the steps of suspending a processing operation of a processing unit during the formation of a processed groove and then imaging the processed groove by using an imaging unit to obtain a detected image, inspecting the condition of the processed groove according to the detected image, inputting a selected one of plural parameters into an input area displayed on a touch panel from an operator in adjusting the parameters to optimize inspection conditions, moving an input cursor from the input area according to the input of the selected parameter, and executing the inspection of the processed groove by using the selected parameter input in the input area.