公开(公告)号：US20240286217A1

公开(公告)日：2024-08-29

申请号：US18570791

申请日：2022-06-14

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Joe HASTY ,  Jay DAVIS

IPC: B23K26/06 ,  B23K26/70 ,  G01J1/42 ,  G02F1/29 ,  G02F1/33

CPC classification number: B23K26/06 ,  B23K26/705 ,  G01J1/42 ,  G02F1/292 ,  G02F1/33 ,  G01J2001/4247 ,  G02F2203/24

Abstract: Numerous embodiments of a laser-processing apparatus are disclosed. In one embodiment, the laser-processing apparatus includes a laser source operative to generate a beam of laser energy, an acousto-optic deflector (AOD) arranged within a beam path, a controller coupled to the AOD, and a beam analysis system operative to measure characteristics of the beam, generate measurement data representative of the measured beam characteristics, and transmit the measurement data to a controller operative to control the operation of the AOD based on that measurement data. In another embodiment, the laser-processing apparatus includes a system for characterization of cross-axis wobble of a galvanometer mirror, comprising a reference laser source configured to emit a reference laser beam, a reflective surface formed on the galvanometer mirror and configured to reflect the reference laser beam to a sensor configured to output a signal representative of the position of the reference beam to a controller.