公开(公告)号：US10242915B2

公开(公告)日：2019-03-26

申请号：US15900248

申请日：2018-02-20

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

发明人： Thomas Gerrer ,  Volker Cimalla ,  Taro Yoshikawa ,  Marina Preschle

IPC分类号： H01L21/20 ,  H01L21/36 ,  H01L21/78 ,  H01L21/84 ,  H01L23/373 ,  H01L23/00 ,  H01L27/12

摘要： A method for transferring at least one thin film from a first substrate to a second substrate is provided, the thin film having a first side and an opposing second side and the second side of the thin film being arranged on a first side of the first substrate, at least part of the first substrate being subsequently removed and the second substrate being brought into contact, via its first side, with the second side of the thin film, wherein a liquid is supplied to the contact surface and then at least some of the liquid is removed by rotating the thin film and the second substrate.

公开(公告)号：US20180240709A1

公开(公告)日：2018-08-23

申请号：US15900248

申请日：2018-02-20

申请人： Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

发明人： Thomas Gerrer ,  Volker Cimalla ,  Taro Yoshikawa ,  Marina Preschle

IPC分类号： H01L21/78 ,  H01L23/00 ,  H01L27/12 ,  H01L23/373 ,  H01L21/84

CPC分类号： H01L21/7806 ,  H01L21/84 ,  H01L23/3732 ,  H01L24/80 ,  H01L27/1218 ,  H01L2224/80006 ,  H01L2224/80085 ,  H01L2224/80894 ,  H01L2224/80948

摘要： A method for transferring at least one thin film from a first substrate to a second substrate is provided, the thin film having a first side and an opposing second side and the second side of the thin film being arranged on a first side of the first substrate, at least part of the first substrate being subsequently removed and the second substrate being brought into contact, via its first side, with the second side of the thin film, wherein a liquid is supplied to the contact surface and then at least some of the liquid is removed by rotating the thin film and the second substrate.