公开(公告)号：US20150234378A1

公开(公告)日：2015-08-20

申请号：US14180560

申请日：2014-02-14

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： William Fosnight ,  Isaac Sarek Banner ,  Stephen Bradley Miner

IPC: G05B19/418

CPC classification number: G05B19/4184 ,  G05B2219/45031 ,  H01L21/67775

Abstract: Automated mechanical handling systems (AMHS) for integrated circuit fabrication, system computers programmed for use in the AMHSs, and methods of handling a wafer carrier having an inlet port and an outlet port are provided. An exemplary method of handling the wafer carrier includes providing a plurality of carrier storage positions that are adapted to receive the wafer carrier. The carrier storage positions include a presence sensor and a gas nozzle. The wafer carrier is loaded into one of the carrier storage positions. The presence of the wafer carrier in the carrier storage position is sensed with the presence sensor. A malfunction in gas flow through the inlet port is identified in the carrier storage position that contains the wafer carrier. The wafer carrier is relocated to another carrier storage position in response to identifying the malfunction.

Abstract translation: 提供了用于集成电路制造的自动机械处理系统（AMHS），被编程用于AMHS的系统计算机以及处理具有入口端口和出口的晶片载体的方法。 处理晶片载体的示例性方法包括提供适于接收晶片载体的多个载体存储位置。 载体存储位置包括存在传感器和气体喷嘴。 晶片载体被加载到载体存储位置之一中。 利用存在传感器感测载体存储位置中的晶片载体的存在。 在包含晶片载体的载体存储位置中识别通过入口的气流的故障。 响应于识别故障，晶片载体被重新定位到另一个载体存储位置。

公开(公告)号：US09411332B2

公开(公告)日：2016-08-09

申请号：US14180560

申请日：2014-02-14

Applicant: GLOBALFOUNDRIES, Inc.

Inventor： William Fosnight ,  Isaac Sarek Banner ,  Stephen Bradley Miner

IPC: H01L21/677 ,  G05B19/418

CPC classification number: G05B19/4184 ,  G05B2219/45031 ,  H01L21/67775

Abstract: Automated mechanical handling systems (AMHS) for integrated circuit fabrication, system computers programmed for use in the AMHSs, and methods of handling a wafer carrier having an inlet port and an outlet port are provided. An exemplary method of handling the wafer carrier includes providing a plurality of carrier storage positions that are adapted to receive the wafer carrier. The carrier storage positions include a presence sensor and a gas nozzle. The wafer carrier is loaded into one of the carrier storage positions. The presence of the wafer carrier in the carrier storage position is sensed with the presence sensor. A malfunction in gas flow through the inlet port is identified in the carrier storage position that contains the wafer carrier. The wafer carrier is relocated to another carrier storage position in response to identifying the malfunction.

Abstract translation: 提供了用于集成电路制造的自动机械处理系统（AMHS），被编程用于AMHS的系统计算机以及处理具有入口端口和出口的晶片载体的方法。 处理晶片载体的示例性方法包括提供适于接收晶片载体的多个载体存储位置。 载体存储位置包括存在传感器和气体喷嘴。 晶片载体被加载到载体存储位置之一中。 利用存在传感器感测载体存储位置中的晶片载体的存在。 在包含晶片载体的载体存储位置中识别通过入口的气流的故障。 响应于识别故障，晶片载体被重新定位到另一个载体存储位置。