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公开(公告)号:US11841103B2
公开(公告)日:2023-12-12
申请号:US17226087
申请日:2021-04-09
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Nicholas Shellenberger , Michael Scalise
Abstract: A pipe assembly is provided, the pipe assembly comprising a first pipe having a side opening on a side surface of the first pipe. A plate in the first pipe is arranged adjacent to the side opening and at an angle relative to a radial axis of the first pipe such that a first side of the plate may be lower than a second side. A vent hole may be proximal the side opening on the side surface of the first pipe.