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公开(公告)号:US20210229935A1
公开(公告)日:2021-07-29
申请号:US16769063
申请日:2019-04-03
Applicant: HARMOTEC CO., LTD.
Inventor: Hideyuki TOKUNAGA , Katsuhiro KOSHIISHI , Hidemitsu TANAKA , Hitoshi IWASAKA
Abstract: A swirl-flow forming body includes a through-hole; a jetting port that is formed on an inner periphery facing the through-hole; a fluid passage that allows fluid to be discharged into the through-hole via the jetting port so as to form a swirl flow that generates negative pressure for applying suction to a target object; and a flange portion that is formed so as to protrude from the inner periphery, the flange portion allowing passage of fluid to which suction is applied by the negative pressure while preventing the fluid discharged via the jetting port from flowing out of the through-hole towards the target object. The inner periphery is formed so as to guide the fluid discharged via the jetting port, in a direction away from the target object, to be discharged from the through-hole.
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公开(公告)号:US20240109734A1
公开(公告)日:2024-04-04
申请号:US18285353
申请日:2022-03-25
Applicant: HARMOTEC CO., LTD.
Inventor: Hitoshi IWASAKA , Hideyuki TOKUNAGA , Katsuhiro KOSHIISHI , Hidemitsu TANAKA , Yuji KASAI , Naonari IWASAKA
CPC classification number: B65G47/91 , B25J15/0683
Abstract: A conveyance equipment includes swirl flow-forming body, discharge fluid rectification cover and skirt. The swirl flow-forming body has columnar first body. A columnar recess is inward of lower end face of first body. A pair of fluid passages are formed in columnar first body to extend to inside surface of columnar recess and supply fluid into columnar recess to generate swirling flow. The discharge fluid rectification cover has a second body which includes a disk-shaped base plate and a peripheral wall that extends around the periphery of the base plate. The second body is positioned to cover the columnar recess. A suction port is in the bottom plate. A discharge passage is in the peripheral wall to extend generally tangential to the inside surface of peripheral wall. The skirt is cylindrical and is made of an elastic thin film, a top opening of which is connected to the suction port.
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公开(公告)号:US20230191620A1
公开(公告)日:2023-06-22
申请号:US17926957
申请日:2021-05-18
Applicant: HARMOTEC CO., LTD.
Inventor: Hitoshi IWASAKA , Hidemitsu TANAKA , Hideyuki TOKUNAGA , Katsuhiro KOSHIISHI , Yuji KASAI , Naonari IWASAKA
IPC: B25J11/00 , B25J15/06 , B25J15/00 , H01L21/683 , H01L21/687
CPC classification number: B25J11/0095 , B25J15/0616 , B25J15/0019 , H01L21/6838 , H01L21/68707
Abstract: A conveyance device includes a plate-shaped main body that faces a plate-shaped object to be conveyed, a plurality of recesses formed in the plate-shaped main body to face an outer circumferential portion of the plate-shaped object to be conveyed, a plurality of discharge channels formed inside the main body, and a plurality of movement restriction members formed on the main body to contact with and to restrict lateral movement of the plate-shaped object to be conveyed. One each of the plurality of discharge channels is connected to one each of the plurality of recesses, and a swirling flow is formed in the plurality of recesses by fluid supplied from the plurality of connected discharge channels. In each of the plurality of recesses, a portion of an opening not covered by the plate-shaped object to be conveyed is covered by one of the plurality of movement restriction members.
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公开(公告)号:US20200164527A1
公开(公告)日:2020-05-28
申请号:US16618545
申请日:2018-09-06
Applicant: HARMOTEC CO., LTD.
Inventor: Hitoshi IWASAKA , Hideyuki TOKUNAGA , Yuji KASAI , Katsuhiro KOSHIISHI , Hidemitsu TANAKA , Hirohiko ONO , Katsutoshi MINOURA , Naonari IWASAKA
Abstract: A suction device that holds a member by suction in a stable manner is provided. The suction device includes a columnar main body, a flat end face formed on the main body, a concave part formed in the end face, a fluid flow-forming means for forming a fluid swirl flow in the concave part by discharging fluid into the concave part, the fluid swirl flow generating negative pressure that applies suction to a member, and a linear guide groove formed on the end surface along a direction in which the fluid discharged into the concave part flows out of the concave part.
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公开(公告)号:US20190027393A1
公开(公告)日:2019-01-24
申请号:US16070995
申请日:2017-10-27
Applicant: HARMOTEC CO., LTD.
Inventor: Hitoshi IWASAKA , Hideyuki TOKUNAGA , Yuji KASAI , Katsuhiro KOSHIISHI , Hidemitsu TANAKA
IPC: H01L21/683 , B25J15/06 , B65G49/06 , B65G49/07 , H01L21/677
Abstract: Baffle plate to be attached to fluid flow-forming body includes baffle plate main body that is attachable to and detachable from fluid flow-forming body. Baffle plate main body allows a fluid to which suction is applied by negative pressure generated by fluid flow-forming body to pass through, while preventing a member from entering concave part of fluid flow-forming body. Baffle plate also includes support member that is attached to main body of fluid flow-forming body at one end thereof, and supports baffle plate main body at the other end thereof such that baffle plate main body opposes end face of fluid flow-forming body. Support member supports baffle plate main body such that a gap between end face and baffle plate main body is maintained, and a fluid path is formed that allows a fluid flowing out of concave part to flow.
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