公开(公告)号：US20220290969A1

公开(公告)日：2022-09-15

申请号：US17681148

申请日：2022-02-25

Applicant: Harbin Institute of Technology

Inventor： Liang Yu ,  Pengcheng Hu ,  Xionglei Lin ,  Xiaobo SU

IPC: G01B9/02 ,  G01B11/26 ,  G01B11/00

Abstract: A single-beam three-degree-of-freedom homodyne laser interferometer based on an array detector. A single-frequency laser beam is input to a Michelson interference structure, the measurement beam and the reference beam perform non-coaxial interference and form a single-beam homodyne interference signal by setting the angle of a reference plane mirror, the array detector is selected to effectively receive the single-beam homodyne interference signal, and finally, three-degree-of-freedom signal linear decoupling on the single-beam homodyne interference signal is achieved through a three-degree-of-freedom decoupling method based on Lissajous ellipse fitting. The laser interferometer does is free of angle decoupling nonlinearity, the period nonlinear error is remarkably reduced, compared with other existing three-degree-of-freedom laser interferometers, the laser interferometer has the advantages of being simple in structure, large in angle measurement range and easy to integrate, and the high-precision requirement of the three-degree-of-freedom laser interferometer for displacement and angle measurement is met.