公开(公告)号：US20240077716A1

公开(公告)日：2024-03-07

申请号：US18507537

申请日：2023-11-13

Applicant: Huawei Technologies Co., Ltd.

Inventor： Fei Zhao ,  Huai Yuan Chu ,  Jinghui Xu ,  Jiahao Wu

IPC: G02B26/08 ,  G02B6/35

CPC classification number: G02B26/0833 ,  G02B6/3518 ,  G02B6/3588

Abstract: A micromirror assembly comprises a first position-limiting part, a micromirror chip, and a second position-limiting part that are stacked. The micromirror chip includes a fastening frame, a movable part, and a first cantilever, where the movable part is connected to the fastening frame by the first cantilever. The first position-limiting part and the second position-limiting part are separately connected to the fastening frame, the first position-limiting part and the second position-limiting part have a hollow area, and the hollow areas are opposite to the movable part. The first position-limiting part and the second position-limiting part are configured to absorb shock from a collision with the micromirror chip, and a projection of a collision part of the first position-limiting part on the micromirror chip intersects with a central axis of the first cantilever.