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公开(公告)号：US3279963A
公开(公告)日：1966-10-18
申请号：US29702663
申请日：1963-07-23
Applicant: IBM
Inventor： CASTRUCCI PAUL P , FOLSOM ROBERT M , PIECZONKA WALDEMAR A
IPC: H01L21/225 , H01L29/00
CPC classification number: H01L21/2254 , H01L29/00 , Y10S148/015 , Y10S148/043 , Y10S148/049 , Y10S148/106 , Y10S148/122 , Y10S148/151
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