公开(公告)号：US11828995B2

公开(公告)日：2023-11-28

申请号：US16995120

申请日：2020-08-17

Applicant: INPHI CORPORATION

Inventor： Radhakrishnan L Nagarajan ,  Masaki Kato

IPC: G02B6/43 ,  G02B6/42 ,  G02B6/122 ,  G02B6/12

CPC classification number: G02B6/43 ,  G02B6/122 ,  G02B6/4206 ,  G02B6/4274 ,  G02B2006/12061

Abstract: A silicon-based edge coupler for coupling a fiber with a waveguide includes a cantilever member being partially suspended with its anchored end coupled to a silicon photonics die in a first part of a silicon substrate and a free end terminated near an edge region separating a second part of the silicon substrate from the first part. The edge coupler further includes a mechanical stopper formed at the edge region with a gap distance ahead of the free end of the cantilever member. Additionally, a V-groove is formed in the second part of the silicon substrate characterized by a top opening and a bottom plane symmetrically connected by two sloped side walls along a fixed Si-crystallography angle. The V-groove is configured to support a fiber with an end facet being pushed against the mechanical stopper and a core center being aligned with the free end of the cantilever member.