公开(公告)号：US20190341899A1

公开(公告)日：2019-11-07

申请号：US16349935

申请日：2016-12-29

Applicant: INTEL CORPORATION

Inventor： Paul FISCHER ,  Mark RADOSAVLJEVIC ,  Sansaptak DASGUPTA ,  Han Wui THEN

IPC: H03H3/02 ,  H03H9/17 ,  H03H9/60

Abstract: Modern RF front end filters feature acoustic resonators in a film bulk acoustic resonator (FBAR) structure. An acoustic filter is a circuit that includes at least (and typically significantly more) two resonators. The acoustic resonator structure comprises a substrate including sidewalls and a vertical cavity between the sidewalls and two or more resonators deposited in the vertical cavity.