公开(公告)号：US20240131538A1

公开(公告)日：2024-04-25

申请号：US18063428

申请日：2022-12-08

Applicant: Industrial Technology Research Institute

Inventor： CHEN-CHUNG DU ,  Ming-Jyh Chang ,  Chang-Yi Chen ,  Ming-Hau Tsai ,  Ko-Chieh chao ,  Yi-Wei Lin

IPC: B05B7/04

CPC classification number: B05B7/0441

Abstract: An annular airflow regulating apparatus includes a cup-shaped element and an adjustment element. The cup-shaped element has a bowl and a bottom, integrated to form a first chamber. The bottom has a tapered channel parallel to an axis and penetrating through the bottom. A ring-shaped groove is disposed between the tapered channel and the bottom. The ring-shaped groove has an annular plane perpendicular to the axis. The adjustment element, having a tapered portion and second holes, is movably disposed in the cup-shaped element. The tapered portion protrudes into the tapered channel A tapered annular gap is formed between the tapered portion and the tapered channel. When the adjustment element is moved with respect to the cup-shaped element, a width of the tapered annular gap is varied, and thereupon a flow rate and velocity of the process gas would be varied accordingly.

公开(公告)号：US20240226929A9

公开(公告)日：2024-07-11

申请号：US18063428

申请日：2022-12-08

Applicant: Industrial Technology Research Institute

Inventor： CHEN-CHUNG DU ,  Ming-Jyh Chang ,  Chang-Yi Chen ,  Ming-Hau Tsai ,  Ko-Chieh chao ,  Yi-Wei Lin

IPC: B05B7/04

CPC classification number: B05B7/0441

Abstract: An annular airflow regulating apparatus includes a cup-shaped element and an adjustment element. The cup-shaped element has a bowl and a bottom, integrated to form a first chamber. The bottom has a tapered channel parallel to an axis and penetrating through the bottom. A ring-shaped groove is disposed between the tapered channel and the bottom. The ring-shaped groove has an annular plane perpendicular to the axis. The adjustment element, having a tapered portion and second holes, is movably disposed in the cup-shaped element. The tapered portion protrudes into the tapered channel A tapered annular gap is formed between the tapered portion and the tapered channel. When the adjustment element is moved with respect to the cup-shaped element, a width of the tapered annular gap is varied, and thereupon a flow rate and velocity of the process gas would be varied accordingly.