公开(公告)号：US20140170308A1

公开(公告)日：2014-06-19

申请号：US13713899

申请日：2012-12-13

Applicant: INTERMOLECULAR INC.

Inventor： Nikhil Kalyankar ,  Richard Blacker ,  Minh Huu Le ,  Mark Lewis ,  Liang Liang

IPC: B05D5/06

CPC classification number: G02B1/115

Abstract: Embodiments provided herein describe antireflective coatings and methods for forming antireflective coatings. A substrate is provided. A first antireflective layer is formed over the substrate. The first antireflective layer has a first refractive index. A second antireflective layer is formed on the first antireflective layer. The second antireflective layer has a second refractive index. The first antireflective layer and the second antireflective layer jointly form an antireflective coating. The antireflective coating is graded such that the antireflective coating comprises at least three sub-layers, each of the at least three sub-layers having a unique refractive index.

Abstract translation: 本文提供的实施方案描述了用于形成抗反射涂层的抗反射涂层和方法。 提供基板。 在衬底上形成第一抗反射层。 第一抗反射层具有第一折射率。 在第一抗反射层上形成第二抗反射层。 第二抗反射层具有第二折射率。 第一抗反射层和第二抗反射层共同形成抗反射涂层。 抗反射涂层被分级，使得抗反射涂层包含至少三个子层，至少三个子层中的每一个具有独特的折射率。

公开(公告)号：US09341751B2

公开(公告)日：2016-05-17

申请号：US13713899

申请日：2012-12-13

Applicant: Intermolecular Inc.

Inventor： Nikhil Kalyankar ,  Richard Blacker ,  Minh Huu Le ,  Mark Lewis ,  Liang Liang

IPC: B05D5/06 ,  G02B1/115

CPC classification number: G02B1/115

Abstract: Embodiments provided herein describe antireflective coatings and methods for forming antireflective coatings. A substrate is provided. A first antireflective layer is formed over the substrate. The first antireflective layer has a first refractive index. A second antireflective layer is formed on the first antireflective layer. The second antireflective layer has a second refractive index. The first antireflective layer and the second antireflective layer jointly form an antireflective coating. The antireflective coating is graded such that the antireflective coating comprises at least three sub-layers, each of the at least three sub-layers having a unique refractive index.

Abstract translation: 本文提供的实施方案描述了用于形成抗反射涂层的抗反射涂层和方法。 提供基板。 在衬底上形成第一抗反射层。 第一抗反射层具有第一折射率。 在第一抗反射层上形成第二抗反射层。 第二抗反射层具有第二折射率。 第一抗反射层和第二抗反射层共同形成抗反射涂层。 抗反射涂层被分级，使得抗反射涂层包含至少三个子层，所述至少三个子层中的每一个具有独特的折射率。