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公开(公告)号：US20220274264A1
公开(公告)日：2022-09-01
申请号：US17583624
申请日：2022-01-25
Applicant: KCTECH CO., LTD.
Inventor： Moon Gi Cho , Hee Sung Chae , Seung Eun Lee , Geun Sik Yun
Abstract: A substrate transferring system may include a first transfer unit to transfer a substrate along a circular first orbit while rotating on a first axis perpendicular to a ground, and a second transfer unit to transfer a substrate along a circular second orbit while rotating on a second axis perpendicular to the ground, wherein the first orbit and the second orbit may overlap with each other at a first point, and at the first point, a substrate may be transferred from the first transfer unit to the second transfer unit or from the second transfer unit to the first transfer unit.
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