公开(公告)号：US20190294923A1

公开(公告)日：2019-09-26

申请号：US16357360

申请日：2019-03-19

Applicant: KLA-Tencor Corporation

Inventor： Ian Riley ,  Li He ,  Sankar Venkataraman ,  Michael Kowalski ,  Arjun Hegde

IPC: G06K9/62 ,  G06N20/00 ,  G06F3/0482 ,  G06T7/00

Abstract: Methods and systems for training a machine learning model using synthetic defect images are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a graphical user interface (GUI) configured for displaying one or more images for a specimen and image editing tools to a user and for receiving input from the user that includes one or more alterations to at least one of the images using one or more of the image editing tools. The component(s) also include an image processing module configured for applying the alteration(s) to the at least one image thereby generating at least one modified image and storing the at least one modified image in a training set. The computer subsystem(s) are configured for training a machine learning model with the training set in which the at least one modified image is stored.

公开(公告)号：US11170255B2

公开(公告)日：2021-11-09

申请号：US16357360

申请日：2019-03-19

Applicant: KLA-Tencor Corporation

Inventor： Ian Riley ,  Li He ,  Sankar Venkataraman ,  Michael Kowalski ,  Arjun Hegde

IPC: G06K9/00 ,  G06K9/62 ,  G06N20/00 ,  G06F3/0482 ,  G06T7/00 ,  G06N3/08

Abstract: Methods and systems for training a machine learning model using synthetic defect images are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a graphical user interface (GUI) configured for displaying one or more images for a specimen and image editing tools to a user and for receiving input from the user that includes one or more alterations to at least one of the images using one or more of the image editing tools. The component(s) also include an image processing module configured for applying the alteration(s) to the at least one image thereby generating at least one modified image and storing the at least one modified image in a training set. The computer subsystem(s) are configured for training a machine learning model with the training set in which the at least one modified image is stored.