Apparatus for fixing solid immersion lens
    1.
    发明授权
    Apparatus for fixing solid immersion lens 有权
    固定浸没透镜的装置

    公开(公告)号:US09575282B2

    公开(公告)日:2017-02-21

    申请号:US14389443

    申请日:2013-09-13

    CPC classification number: G02B7/023 G01Q60/22 G02B7/025 G02B7/04 G02B27/56

    Abstract: Provided is an apparatus for fixing a solid immersion lens (SIL) in an optical system. The apparatus includes a first adapter; a second adapter screw-coupled to the inner surface of the first adapter and screw-coupled to the outer surface of a third adapter to pressurize a first O-ring; the third adapter screw-coupled to the inner surfaces of the second adapter and a fourth adapter; the fourth adapter screw-coupled to the outer surface of the third adapter to pressurize a second O-ring; the first and second O-rings elastically fixing an outer surface of a barrel of an infrared ray (IR) objective lens; and an SIL holder mounting the SIL onto the first adapter.

    Abstract translation: 提供了一种用于将固体浸没透镜(SIL)固定在光学系统中的装置。 该装置包括第一适配器; 第二适配器,其螺纹联接到所述第一适配器的内表面,并且螺纹连接到第三适配器的外表面以对第一O形环加压; 所述第三适配器螺纹连接到所述第二适配器的内表面和第四适配器; 所述第四适配器螺纹连接到所述第三适配器的外表面以加压第二O形环; 所述第一和第二O形环弹性地固定红外线(IR)物镜的镜筒的外表面; 以及将SIL安装到第一适配器上的SIL保持架。

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