公开(公告)号：US20240328968A1

公开(公告)日：2024-10-03

申请号：US18625034

申请日：2024-04-02

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Hye Jung Chang ,  Dae-Young Kim ,  Ha Neul Choi

IPC: G01N23/20025 ,  G01N23/223 ,  G01N23/2251

CPC classification number: G01N23/20025 ,  G01N23/223 ,  G01N23/2251

Abstract: The present disclosure relates to an SEM-EDS analysis holder device configured to fix a sample in an SEM-EDX analysis apparatus. More specifically, the present disclosure relates to an SEM-EDS analysis holder device capable of minimizing damage to a sample and reusing the sample. An object of the present disclosure is to provide an SEM-EDS analysis holder device capable of minimizing damage to a sample and reusing the sample in an SEM-EDX analysis apparatus configured by attaching an energy dispersive X-rays spectroscope (EDS) detector to scanning electron microscopy (SEM). Another object of the present disclosure is to provide an SEM-EDS analysis holder device that is easily attached or detached and includes chemical components detected by an EDS detector without a component of a holder.