公开(公告)号：US10930894B2

公开(公告)日：2021-02-23

申请号：US15690040

申请日：2017-08-29

Applicant: LG Display Co., Ltd.

Inventor： Namkook Kim ,  Jejun Park ,  Seunglyul Lee ,  Taejoon Song ,  Shinbok Lee ,  Kyunghoon Lee

IPC: C23C14/56 ,  H01L51/56 ,  H01L51/00 ,  C23C14/04 ,  C23C16/04 ,  C23C16/06 ,  C23C16/448 ,  C23C16/46 ,  C23C16/54

Abstract: In a roll to roll fabricating system, a plurality of deposition units are provided, and a turning unit is disposed between the deposition units. The deposition units include: a deposition drum on which a film is wound; and one or more evaporators disposed to face the deposition drum, and configured to deposit the film wound on the deposition drum. The turning unit includes a plurality of turning rolls, and is configured to turn the film output from one deposition unit, to guide the film, and to supply the film to another deposition unit.