公开(公告)号：US20040266330A1

公开(公告)日：2004-12-30

申请号：US10868939

申请日：2004-06-17

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Dong-Han Kim

IPC: B01L001/04

CPC classification number: F24F3/161 ,  Y10S414/135

Abstract: A clean room system is provided. The clean room includes a plurality of multi-level clean rooms and an air passage. The plurality of multi-level clean rooms has at least a lower clean room and an upper clean room above the lower clean room. The air passage permits air flow between the upper clean room and the lower clean room and smooths the air flow.

Abstract translation: 提供洁净室系统。 洁净室包括多个多层洁净室和空气通道。 多层次的洁净室至少有一个下层洁净室和一个位于上层洁净室上方的洁净室。 空气通道允许上清洁室和下洁净室之间的空气流动，并使气流平滑。