公开(公告)号：US20170059295A1

公开(公告)日：2017-03-02

申请号：US15248507

申请日：2016-08-26

Applicant: MITUTOYO CORPORATION

Inventor： Kazuhiro ISHIZU ,  Ryohei KANNO ,  Takahiro ITO

IPC: G01B5/00 ,  G01B3/00

CPC classification number: G01B5/0004 ,  G01B3/008 ,  G01B5/0002

Abstract: A measuring apparatus of the present invention includes a stage on which a measured object is placed, a measurement head having an information obtainer obtaining an image of the object, and a vertical driver supporting the measurement head so as to allow movement in a vertical direction. The vertical driver includes a counterbalance mechanism having a hanger of the measurement head, a pulley winding up and withdrawing the hanger by rotation, a spring increasing elastic force by stretching the spring when the measurement head displaces downward, and a cam rotating in conjunction with the pulley and having a cam shape decreasing rotational torque provided to the pulley by the elastic force as a stretching amount of the spring increases.

Abstract translation: 本发明的测量装置包括放置测量对象的台，具有获得物体的图像的信息获取器的测量头和支撑测量头的垂直驱动器，以允许在垂直方向上移动。 垂直驱动器包括具有测量头的悬挂器的平衡机构，通过旋转而卷起和吊架的滑轮，当测量头向下移动时通过拉伸弹簧增加弹簧的弹簧和与 滑轮，并且当弹簧的拉伸量增加时，具有通过弹力而提供给滑轮的旋转扭矩减小的凸轮形状。