公开(公告)号：US11193762B2

公开(公告)日：2021-12-07

申请号：US16380335

申请日：2019-04-10

Applicant: MITUTOYO CORPORATION

Inventor： Hisayoshi Sakai ,  Junsuke Yasuno ,  Ryosuke Watanabe

IPC: G01B21/30 ,  G01B21/20 ,  B23Q1/64 ,  G12B5/00

Abstract: A rotary disk rotatable around a vertical rotation axis; a bearing supporting the rotary disk so as to be freely rotatable; a slide disk slidable on a top surface of the rotary disk; a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk; a placement disk that is supported by the slide disk; a plurality of air nozzles that are arranged on a top surface of the stator in an annular shape centered on the rotation axis, and form a static pressure air film between the top surface of the stator and a bottom surface of the rotary disk; an aerostatic pocket formed between the top surface of the rotary disk and a bottom surface of the slide disk; and a communication aperture is formed on the rotary disk and introduces pressure of the static pressure air film into the aerostatic pocket.