公开(公告)号：US09333645B1

公开(公告)日：2016-05-10

申请号：US14639960

申请日：2015-03-05

Applicant: Macau University of Science and Technology

Inventor： Naiqi Wu ,  Mengchu Zhou ,  Chunrong Pan ,  Yan Qiao

IPC: G05D3/12 ,  B25J9/00 ,  G05B19/418 ,  G06F17/50

CPC classification number: B25J9/0087 ,  G05B19/41865 ,  G05B2219/32245 ,  G05B2219/45031 ,  G06F17/5013 ,  H01L21/67742 ,  Y02P90/20 ,  Y10S901/02 ,  Y10S901/41

Abstract: A method for scheduling dual-armed cluster tools with wafer revisiting is provided. In order to speed up start-up transient processes, the present invention adopts a program evaluation and review technique for the analysis of start-up transient processes and develops optimization algorithms for their scheduling for dual-arm cluster tools. Then, their complexity is analyzed.

Abstract translation: 提供了一种使用晶片重新访问来调度双机群集工具的方法。 为了加快启动瞬态过程，本发明采用程序评估和审查技术对启动瞬态过程进行分析，并开发了用于双臂集群工具调度的优化算法。 然后分析其复杂性。